|Dr. Sadayuki Yoshitomi, Kioxia Corporation, Japan|
|Title: For successful Smart Factory; Combination of Transistors’ compact model and Big Data for future Industory
For the future IC production, organic link between update of “process design kit” and existing feed-forward process is important. This talk addresses, indication how such organic link be established.Actually three key issues to realize this. (1) To design “in-line test structure” to access big data, that cover wide frequency bandwidth measurement, (2) To develop automated measurement scheme having stability and robustness against surrounding environment, and (3) To continuous monitor the big data and update the PDK (process design kit). More details will be presented in the talk.
Sadayuki Yoshitomi received Ph.D degree from Yokohama National University, Yokohama, Japan in 1993. In 1993, he joined Research and Development Center of Toshiba Corporation in Kawasaki, Japan, where he was engaged in the research and development of RF BiCMOS technologies. In 1998, he moved to system-LSI development division, where he was involved in the developments of RF-CMOS process design kits from 130nm to 40nm. Since 2016, he belongs to Toshiba Memory Corporation, engaged in the development of process design kits and compact models for 3D NAND-Flash memory products. He is currently a member of technical program committee of ESSDERC(European Solid State Device Research Conference), BCICTS (BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium), Mixdes conferences. (Mixed Design of Integrated Circuits and Systems) IRPhE’ (International Conference on Microwave & THz Technologies, and Wireless Communications), and extended compact modeling committee of MOS-AK.